| 摘要 |
<p>A method to form a structure includes: a micro pattern includes a step of coating a structure which includes guide blocks extended in a first direction and are separated from each other in a second direction vertical to the first direction with a sacrificial material; a step of exposing the upper part of the guide blocks by ashing part of the sacrificial material; a step of coating the structure with a first material having an opposite polarity to a filling material filled in the structure; a step of chemically combining the first material with the upper part of the guide block by performing a heating process on the structure; a step of removing the sacrificial material and the first material, and forming a first material cap which is chemically combined with the upper part of the guide block; and a step of filling the structure with the filling material.</p> |
