发明名称 |
METHOD OF FORMING FINS FROM DIFFERENT MATERIALS ON A SUBSTRATE |
摘要 |
A method of forming fins of different materials includes providing a substrate with a layer of a first material having a top surface, masking a first portion of the substrate leaving a second portion of the substrate exposed, etching a first opening at the second portion, forming a body of a second material in the opening to a level of the top surface of the layer of the first material, removing the mask, and forming fins of the first material at the first portion and forming fins of the second material at the second portion. A finFET device having fins formed of at least two different materials is also disclosed. |
申请公布号 |
WO2015017283(A1) |
申请公布日期 |
2015.02.05 |
申请号 |
WO2014US48270 |
申请日期 |
2014.07.25 |
申请人 |
QUALCOMM INCORPORATED |
发明人 |
SONG, STANLEY SEUNGCHUL;WANG, ZHONGZE;YEAP, CHOH FEI |
分类号 |
H01L21/8234;H01L21/8258;H01L21/84;H01L27/12 |
主分类号 |
H01L21/8234 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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