| 摘要 |
<p>PURPOSE: A multi-axis CNC(Computer Numerical Control) silicon processing machine is provided to maintain machined holes of a silicon product at a constant size and space and to improve the vertical straightness and the chipping performance of the holes. CONSTITUTION: A multi-axis CNC silicon processing machine comprises a worktable(120), a Y-axis driving unit(130), a headstock(140), a Z-axis driving unit(150), and an X-axis driving unit(160). Two silicon base materials are loaded on the worktable in parallel. The Y-axis driving unit transfers the worktable to a longitudinal direction of a front side of a machine body(110). Two spindles(141,143) processes the two silicon materials on the top of the worktable at the same time. The Z-axis driving unit transfers the worktable to a vertical direction of the front side of the machine body. The X-axis driving unit transfers the headstock including the Z-axis driving unit to a horizontal direction of the front side of the machine body.</p> |
