SEMICONDUCTOR DEVICE PROVIDED WITH DIRECTION SENSOR ELEMENTS

摘要

A semiconductor device is provided with a substrate including a main surface and a back surface that face in opposite directions to each other in a thickness direction, and first, second and third direction sensor elements having different detection reference axes from each other. The substrate is formed with a recessed portion that is recessed from the main surface toward the back surface side. The first direction sensor element is disposed at least partially within the recessed portion. The second direction sensor element is disposed so as to overlap with the main surface as viewed in the thickness direction.

主权项

1. A semiconductor device comprising:
a substrate including a main surface and a back surface that face in opposite directions to each other in a thickness direction; and first, second and third direction sensor elements having different detection reference axes from each other; wherein the substrate is formed with a recessed portion that is recessed from the main surface toward the back surface, the first direction sensor element is disposed at least partially within the recessed portion, and the second direction sensor element is disposed so as to overlap with the main surface as viewed in the thickness direction.