发明名称 |
DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS |
摘要 |
The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved. |
申请公布号 |
WO2015017743(A1) |
申请公布日期 |
2015.02.05 |
申请号 |
WO2014US49329 |
申请日期 |
2014.08.01 |
申请人 |
CAVENDISH KINETICS, INC |
发明人 |
KNIPE, RICHARD, L.;SMITH, CHARLES, G.;GADDI, ROBERTO;VAN KAMPEN, ROBERTUS, PETRUS |
分类号 |
H01H59/00;B81B7/04;H01G5/38 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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