SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENT, SEMICONDUCTOR LIGHT EMITTING ELEMENT, MANUFACTURING METHOD OF SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING ELEMENT, AND SEMICONDUCTOR LIGHT EMITTING ELEMENT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a semiconductor light emitting element, a semiconductor light emitting element, a manufacturing method of a substrate for a semiconductor light emitting element, which can improve extraction efficiency of light produced by a light emitting structure.SOLUTION: A substrate for a semiconductor light emitting element comprises a light emitting structure formation surface 11S on which a light emitting structure including semiconductor layers is formed. The light emitting structure formation surface 11S includes a flat part 14 expanding along one crystal plane, a plurality of large protrusions 12 each having a protruding surface 12S protruding from the flat part 14, and a plurality of small protrusions 13 protruding from the protruding surface 12S.