| 摘要 |
Disclosed are a system and a method for inspecting an object surface. The system for inspecting a surface of an object according to an embodiment includes: an illumination source to illuminate the object surface; an optical device to intercept scattered light from the illuminated object surface and to project a real image of an area of the object surface; and a sensor to receive the projected real image. A computer system is coupled to the sensor to store and analyze the real image. The method for inspecting a surface of an object according to an embodiment includes the steps of: illuminating the object surface; intercepting scattered light from the illuminated object surface; and projecting a real image of a desired area of the object surface to a sensor. The real image may be processed to detect particles located on the object surface. Thus, the system and method are provided to detect a foreign material or a defect on a reticle by performing in-situ inspection. |
