发明名称 SILVER-BASED CYLINDRICAL TARGET AND PROCESS FOR MANUFACTURING SAME
摘要 A silver-based cylindrical target is provided. The target consists of silver or a single-phase silver alloy in which an additive component is solid-soluted, wherein a ratio A/B is 0.8-1.2, A being a diameter of crystal grains in a direction along a central axis of a cylinder in a cross section including the central axis of the cylinder; and B being a diameter of crystal grains in a direction perpendicular to the central axis, an oxygen content is 100 ppm or less, and a content of non-metallic inclusions is 20 ppm or less.
申请公布号 EP2832895(A1) 申请公布日期 2015.02.04
申请号 EP20120872951 申请日期 2012.11.14
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 KOMIYAMA, SHOZO
分类号 C23C14/34;B21C1/00;B21C23/00;B21C23/08;C22C5/06;C22F1/00;C22F1/14;H01L51/50;H05B33/10;H05B33/26 主分类号 C23C14/34
代理机构 代理人
主权项
地址