发明名称 保護膜およびそれを作製する方法
摘要 The problems in accordance with the present invention are: to provide a DLC film, wherein a protective film having a segmented shape is easily formed, quality control of the protective film is improved, segmented shapes with a high degree of freedom (that are complicated) are possible, and the application of the DLC film is possible not only to two-dimensional shapes but also to three-dimensional shapes; and to provide a method for forming the DLC film. As solutions to the problems, there are provided a protective film and a method for producing the protective film, characterized by, when forming on a substrate the protective film having a segmented shape formed by depositing a film so that the film is formed divided into segments, masking the substrate using a drawing material so that segments having predetermined shapes are obtained, thereafter depositing the protective film, and then removing the masked part to form a spacing between segments.
申请公布号 JP5663793(B2) 申请公布日期 2015.02.04
申请号 JP20110530919 申请日期 2010.09.10
申请人 株式会社iMott 发明人 大竹 尚登;松尾 誠;岩本 喜直
分类号 C23C16/04;B23C3/34;B32B38/00 主分类号 C23C16/04
代理机构 代理人
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