Solid-state image sensing device

摘要

A solid-state image sensing device includes light-receiving regions and a color filter which transmits red light, a color filter which transmits blue light, and a color filter which transmits green light is provided. The color filters are arranged on a one-to-one basis above the light-receiving regions. Above the light-receiving region where the color filter which transmits red or blue light is arranged, a light-transmitting film, an antireflection film, a light-transmitting film, an antireflection film, and a light-transmitting film are arranged, in this order from the light-receiving region, between the light-receiving region and the color filter. Above the light-receiving region where the color filter which transmits green light is arranged, a light-transmitting film, an antireflection film, and a light-transmitting film are arranged, in this order from the light-receiving region, between the light-receiving region and the color filter. The antireflection films are higher in refractive index than the light-transmitting films.

主权项

1. A solid-state image sensing device comprising:
a light-receiving region; a gate electrode adjacent to the light-receiving region; a first light-transmitting film arranged above the light-receiving region and the gate electrode; a first antireflection film arranged directly over the light-receiving region and the gate electrode via the first light-transmitting film, the first antireflection film including different material from the first light-transmitting film; a second light-transmitting film arranged above the first antireflection film; and a second antireflection film arranged on an upper face of the second light-transmitting film and over the light-receiving region, the second antireflection film including different material from the second light-transmitting film, wherein the first antireflection film includes a portion extending beyond a position under an edge of the second antireflection film.