发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device in which a cutting blade can be attached to and detached from a support flange efficiently.SOLUTION: Cutting means of a cutting device comprises a support flange mounted to a tip of a spindle, a cutting blade detachably and attachably supported by the support flange, and a fixing flange for fixing the cutting blade supported by the support flange. The support flange includes a boss part in which an opening formed at a center of the cutting blade is inserted, a collar part integrally formed on an outer periphery of the boss part and supporting a face of the cutting blade, and a cylindrical part fitted with a tip of the spindle. A suction hole opened on the fixing flange side is formed at the collar part of the support flange, and a communication hole communicated with the suction hole is formed at the cylindrical part of the support flange. The communication hole is selectively communicated with a suction source via a rotary joint and an on-off valve fixed to the spindle housing.
申请公布号 JP2015023139(A) 申请公布日期 2015.02.02
申请号 JP20130149697 申请日期 2013.07.18
申请人 DISCO ABRASIVE SYST LTD 发明人 WAKITA NOBUHIKO
分类号 H01L21/301;B24B27/06;B24B45/00 主分类号 H01L21/301
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