PRODUCTION METHOD OF METAL MASK, AND METAL MASK

摘要

PROBLEM TO BE SOLVED: To provide a production method of a metal mask capable of forming a fine opening part on a tabular substrate, while suppressing generation of large burr, and to provide the metal mask.SOLUTION: A production method of a metal mask includes steps for: forming a recessed part locally on a first surface by etching the first surface of a tabular substrate comprising a metal material; and forming a hole part penetrating from a bottom surface to the rear surface of the bottom surface by irradiating the bottom surface of the recessed part of the substrate or the rear surface of the bottom surface with a pulse laser having a shorter pulse width than 1 nanosecond.