发明名称 |
Interference electron microscope |
摘要 |
In an interference electron microscope, a first electron biprism (12) is disposed between an acceleration tube (39) and an illumination-lens system, a mask (29) is disposed between the acceleration tube and the first electron biprism, and the first electron biprism is arranged in a shadow that the mask forms. Current densities of first and second electron beams on a parabolic surface of an objective lens system where a sample (6) is positioned are controlled by a control system by an optical action of the illumination-lens system, the mask is imaged on the parabolic surface of the objective lens system, and an electro-optical length between the first electron biprism and the parabolic surface of the objective lens where the sample is positioned is controlled without generating Fresnel fringes on a sample surface from the mask and the first electron biprism. |
申请公布号 |
EP2667400(A3) |
申请公布日期 |
2015.01.28 |
申请号 |
EP20130169141 |
申请日期 |
2013.05.24 |
申请人 |
RIKEN;HITACHI LTD. |
发明人 |
TANIGAKI, TOSHIAKI;AIZAWA, SHINJI;MATSUDA, TSUYOSHI;HARADA, KEN;TAKAHASHI, YOSHIO |
分类号 |
H01J37/295 |
主分类号 |
H01J37/295 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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