| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To further simplify attachment and detachment work of a plurality of inductively coupled electrodes 47 to and from a ceiling wall 15 of a vacuum chamber 3. <P>SOLUTION: In a support tool, a pair of support towers 95 is removably installed on an outer wall of the ceiling wall 15 of the vacuum chamber 3; spring balancers 101 are suspended from each support tower 95; a pair of vertically movable slide bars 111 that can be inserted into through-holes 17 of the ceiling wall 15 of the vacuum chamber 3 is coupled to the tip of an operating member 107 of each spring balancer 101; and locking members 115 that can lock a holder 65 are coupled to the lower ends of each pair of slide bars 111. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
