SPECTRAL ELLIPSOMETER WITH DEVICE OF MAGNETODYNAMIC MEASUREMENTS

摘要

FIELD: measurement equipment.SUBSTANCE: invention relates to the field of in situ monitoring of production under conditions of ultrahigh vacuum of nanosized magnetic structures and may be used in magnetic nanoelectronics for characterisation of heterogeneous magnetic elements in memory devices, in sensor devices, etc. The spectral ellipsometer additionally comprises a magnetodynamic module made of axial coils of various diameters, which performs measurements based on non-linearity of film magnetisation characteristic. Therefore, film thickness may be determined on the basis of independent measurements.EFFECT: increased functionality and accuracy of measurements due to usage of an additional optically non-correlated method.3 dwg