发明名称 HIGH FREQUENCY DEVICE AND METHOD FOR INSPECTING HIGH FREQUENCY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide: a high frequency device in which a short circuit between a signal line and a ground terminal can be prevented while the signal line and the ground terminal are provided to be adjacent to each other, and capable of accurately bringing a conductor into contact with the signal line and the ground terminal; and a method for inspecting the high frequency device.SOLUTION: A high frequency device includes: a base 12 having a main surface; a dielectric 20 formed on a part of the main surface; a signal line formed on the upper surface of the dielectric; and ground terminal 24, 26 formed to sandwich the signal line on the upper surface of the dielectric and having upper surface portions 24a, 26a. Grooves 28a, 28b or steps 308a, 308b for imparting a height difference between the signal line and the upper surface portions, which are formed between the signal line of the dielectric and the upper surface portions.
申请公布号 JP2015015279(A) 申请公布日期 2015.01.22
申请号 JP20130139544 申请日期 2013.07.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 YOSHIOKA TAKAAKI
分类号 H01L23/02;G01R31/26;H01L23/04 主分类号 H01L23/02
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