发明名称 |
OPTOMECHANICAL ACCELEROMETER |
摘要 |
Technologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration applied to the chip. The cavity-resonant sensor may be fully integrated on-chip and exhibit an enhanced displacement resolution due to its strong optomechanical coupling. The accelerometer structure may be fabricated in a silicon nitride thin film and constitute a rectangular test mass flexibly suspended on high aspect ratio inorganic nitride nano-tethers under high tensile stress. By increasing the mechanical Q-factors through adjustment of tether width and tether length, the noise-equivalent acceleration (NEA) may be reduced, while maintaining a large operation bandwidth. The mechanical Q-factor may be improved with thinner (e.g., <1 micron) and longer tethers (e.g., 10-560 microns). |
申请公布号 |
US2015020590(A1) |
申请公布日期 |
2015.01.22 |
申请号 |
US201314379744 |
申请日期 |
2013.03.01 |
申请人 |
California Institute of Technology ;University of Rochester |
发明人 |
Painter Oskar;Winger Martin;Lin Qiang;Krause Alexander;Blasius Tim D. |
分类号 |
G01P15/093;G01N21/55;B82Y99/00;B81B3/00;B81C1/00;G01N21/59;H01L21/02 |
主分类号 |
G01P15/093 |
代理机构 |
|
代理人 |
|
主权项 |
1. An optomechanical accelerometer device, comprising:
a frame; a test mass; a plurality of nano-tethers coupling the test mass to the frame; and a zipper cavity structure formed by a portion of the test mass and an adjacent portion of the frame. |
地址 |
Pasadena CA US |