FIELD EFFECT TRANSISTOR INCORPORATING A SCHOTTKY DIODE

摘要

A FET incorporating a Schottky diode has a structure allowing the ratio of an area in which the Schottky diode is formed and an area in which the FET is formed to be freely adjusted. A trench extending for a long distance is utilized. Schottky electrodes are interposed at positions appearing intermittently in the longitudinal direction of the trench. By taking advantage of the growth rate of a thermal oxide film formed on SiC being slower, and the growth rate of a thermal oxide film formed on polysilicon being faster, a structure can be obtained in which insulating film is formed between gate electrodes and Schottky electrodes, between the gate electrodes and a source region, between the gate electrodes and a body region, and between the gate electrodes and a drain region, and in which insulating film is not formed between the Schottky electrodes and the drain region.

主权项

1. A FET incorporating a Schottky diode, comprising:
a source region formed in a position facing a surface of a semiconductor substrate, a body region disposed at a deep side of the source region, a drain region disposed at a deep side of the body region, and a trench passing from the surface of the semiconductor substrate through the source region and the body region and reaching the drain region, wherein the trench extends linearly along the surface of the semiconductor substrate, gate electrodes and Schottky electrodes being filled alternately within the trench when viewed along the length of the trench, and insulating film formed between each of the gate electrodes and the Schottky electrodes, the gate electrodes and the source region, the gate electrodes and the body region, and the gate electrodes and the drain region, wherein an insulating film is not formed between the Schottky electrodes and the drain region.