发明名称 COMPRESSIVE STRESS TRANSFER IN AN INTERLAYER DIELECTRIC OF A SEMICONDUCTOR DEVICE BY PROVIDING A BI-LAYER OF SUPERIOR ADHESION AND INTERNAL STRESS
摘要 <p>The present disclosure provides manufacturing techniques and semiconductor devices in which performance of P-channel transistors may be enhanced on the basis of a stress mechanism that involves the deposition of a dielectric bi-layer system. Contrary to conventional strategies, an additional pre-treatment may be performed prior to the deposition of an adhesion layer in a plasma-free process atmosphere, thereby enabling a reduced thickness of the adhesion layer and a higher internal stress level of the subsequent top layer.</p>
申请公布号 KR101482697(B1) 申请公布日期 2015.01.21
申请号 KR20130084832 申请日期 2013.07.18
申请人 发明人
分类号 H01L21/335;H05H1/02 主分类号 H01L21/335
代理机构 代理人
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