发明名称 REFRACTIVE INDEX MEASUREMENT METHOD, REFRACTIVE INDEX MEASUREMENT APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To measure a phase refractive index of a test object with high accuracy.SOLUTION: Light from a light source 10 is divided into test light and reference light, and the test light and reference light having been transmitted through a test object 80 interfere with each other to obtain interference signals. By the use of the interference signals, a phase refractive index of the test object 80 is measured. This refractive index measurement method comprises: obtaining a phase refractive index of a reference test object 80; calculating a first physical quantity that is a function of the phase refractive index of the test object 80; calculating the phase refractive index of the test object 80 using the first physical quantity and the phase refractive index of the reference test object; calculating a second physical quantity that is a function of the calculated phase refractive index of the test object 80; changing the phase refractive index of the reference test object so as to reduce the difference between the first physical quantity and the second physical quantity; and recalculating the phase refractive index of the test object 80 using the changed phase refractive index of the reference test object.</p>
申请公布号 JP2015010920(A) 申请公布日期 2015.01.19
申请号 JP20130136167 申请日期 2013.06.28
申请人 CANON INC 发明人 SUGIMOTO TOMOHIRO
分类号 G01M11/02;G02B3/00 主分类号 G01M11/02
代理机构 代理人
主权项
地址