SUCTION STRUCTURE, ROBOT HAND AND ROBOT

摘要

The purpose of the present invention is to reliably suck a substrate having flexibility. A suction structure according to an embodiment of the present invention comprises a pad and a fixing base. The pad includes a contact portion which has a seal wall and is contacted with an object to be sucked, a major surface portion which is surrounded by the contact portion and defines an inner space together with the seal member as the contact portion is contacted with the object to be sucked, and a thin portion formed in the major surface portion. The fixing base includes a suction hole to allow the inner space to communicate with a vacuum source, and supports the pad.