| 摘要 |
<p>PROBLEM TO BE SOLVED: To hold a substrate while correcting warping of the substrate.SOLUTION: A substrate holding device includes: a holding part which holds a peripheral edge of a substrate; a moving part which moves the holding part toward the outside of the substrate in a state of holding the substrate at the holding part; and an inclination part which causes the peripheral edge of the substrate to be inclined in a state of holding the substrate.</p> |
