Photo device inspection apparatus and photo device inspection method

摘要

A photo device inspection apparatus (100) is an apparatus for inspecting a solar cell panel (90), which is a photo device. The photo device inspection apparatus (100) includes an irradiation part (12) configured to irradiate the solar cell panel (90) with pulsed light (LP11) radiated from a femtosecond laser (121), which is a light source, an electromagnetic wave detection part (132) configured to detect a pulse of an electromagnetic wave (LT1) radiated from the solar cell panel (90) in response to irradiation with the pulsed light (LP11), and an ammeter (14) configured to detect a current generated by the solar cell panel (90) in response to irradiation with the pulsed light (LP11).