| 摘要 |
FIELD: chemistry.SUBSTANCE: invention relates to the application of coatings by carrying out nonequilibrium processes of sputtering in vacuum by an ion beam. It can be used for the creation of autoemission cathodes, strengthening working edges of a cutting instrument, in particular surgical, protection against chemically aggressive media and higher temperatures, requiring chemical inertness and biocompatibility of coatings, high hardness and low friction, high heat conductivity of coatings. A graphite target is sputtered by the ion beam and carbon vapours are condensed on a substrate. Sputtering of a part of the ions by a grown layer is executed with grazing incidence of ions on the substrate surface. Recoil atoms create on the growth surface of the layer compressive stresses 10 GPa, sufficient for the formation of a diamond phase.EFFECT: increase of the process efficiency is provided due to the optimisation of technological parameters of achieving oversaturation of carbon atoms and obtaining nanosized layers, possessing high hardness, chemical inertness, low friction, high heat conductivity, low output work function.2 cl, 5 dwg, 1 ex |
