SELF-POWERED PIEZOELECTRIC ENERGY HARVESTING MICROSYSTEM

摘要

A self-powered piezoelectric energy harvesting microsystem device has CMOS integrated circuit elements, contacts and interconnections formed at a proof mass portion of a die region of a semiconductor wafer. Piezoelectric energy harvesting unit components connected to the integrated circuit elements are formed at a thinned beam portion of the die region that connects the proof mass portion for vibration relative to a surrounding anchor frame portion. A battery provided on the proof mass portion connects to the integrated circuit elements. In a cantilever architectural example, the battery is advantageously located at a distal end of the proof mass portion, opposite the joinder with frame portion via the beam portion.

主权项

1. A method of forming a self-powered piezoelectric energy harvesting microsystem, comprising:
forming integrated circuit elements including transistor gate structures and source/drain regions using CMOS processing steps at a proof mass first portion of a die region of a semiconductor wafer substrate; depositing and patterning dielectric layers and metal layers at the first portion of the die region to form contacts and interconnections for the integrated circuit elements; depositing and patterning first electrode, piezoelectric material and second electrode layers at a beam second portion of the die region to form piezoelectric energy harvesting unit components connected to the integrated circuit elements; etching fully through the substrate to form a support frame third portion of the die region separated by a gap from a majority of the first portion and joining by the second portion to a minority of the first portion; etching partially through the substrate to thin the second portion; and providing a battery connected to the integrated circuit elements at the first portion of the die region.