PROTECTIVE FILM FORMING METHOD, AND SURFACE FLATTENING METHOD

摘要

A method for flattening a surface of a substrate in which a film formation surface has a recess and a convex and a method for forming a protective film by using a photo-curable organic thin film material are provided. A gas of an organic thin film material having photocurability is liquefied on the surface of a substrate having the recess and the convex and a liquid organic layer is grown on the surface of the substrate (first liquid layer growing step T1); and the growth is terminated when a liquid organic layer having a flat surface is formed (first growth termination step T2).