Method for manufacturing semiconductor device

摘要

A semiconductor device includes: an n−-type base layer; a p-type base layer formed in a part of a front surface portion of the n−-type base layer; an n+-type source layer formed in a part of a front surface portion of the p-type base layer; a gate insulating film formed on the front surface of the p-type base layer between the n+-type source layer and the n−-type base layer; a gate electrode that faces the p-type base layer through the gate insulating film; a p-type column layer formed continuously from the p-type base layer in the n−-type base layer; a p+-type collector layer formed in a part of a rear surface portion of the n−-type base layer; a source electrode electrically connected to the n+-type source layer; and a drain electrode electrically connected to the n−-type base layer and to the p+-type collector layer.

主权项

1. A method of manufacturing a semiconductor device, comprising:
forming a first conductive type base layer; forming a second conductive type base layer in a part of a front surface portion of the first conductive type base layer; forming a first conductive type source layer in a part of a front surface portion of the second conductive type base layer; forming a second conductive type column layer continuously from the second conductive type base layer within the first conductive type base layer so as to extend from the second conductive type base layer toward a rear surface of the first conducive type base layer; forming a gate insulating film on a front surface of the second conductive type base layer between the first conductive type source layer and the first conductive type base layer; forming a gate electrode on the gate insulating film so as to face, through the gate insulating film, the second conductive type base layer between the first conductive type source layer and the first conductive type base layer; forming a source electrode electrically connected to the first conductive type source layer; forming a second conductive type collector layer in a part of a rear surface portion of the first conductive type base layer; and forming a drain electrode electrically connected to the first conductive type base layer and the second conductive type collector layer.