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发明名称
半导体制造工具的强化方法;METHOD FOR STRENGTHENING SEMICONDUCTOR MANUFACTURING TOOLS
摘要
本发明为一种半导体制造工具的强化方法,包括有下列步骤:提供一模仁、形成原生氧化层、附着离型剂以及形成玻璃键结离型层,以上步骤所形成之坚固的玻璃键结离型层系均匀分布地包覆于模仁表面,使半导体制造工具之模仁可以降低磨耗提高模仁耐用度并节省成本,使模仁容易脱模提高生产速率,且模仁表面玻璃键结离型层的均匀分布又可使模仁制造之子模良率提升。
申请公布号
TW201501175
申请公布日期
2015.01.01
申请号
TW102121818
申请日期
2013.06.19
申请人
奈米晶光电股份有限公司
发明人
李崇民;李崇华
分类号
H01L21/027(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
傅尹坤
主权项
地址
台北市松山区南京东路3段248号17楼之2 TW
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