ULTRA THIN ALIGNMENT WALLS FOR DI-BLOCK COPOLYMER

摘要

METHODS COMPRISING PROVIDING A PRE-PATTERNED SUBSTRATE (200) HAVING AN ARRAY OF THICK WALLS (240), DEPOSITING A CONFORMING LAYER (250) ON THE PRE-PATTERNED SUBSTRATE, ETCHING THE CONFORMING LAYER FROM THE TOP OF THE THICK WALLS AND THE SPACE BETWEEN THE WALLS, AND ETCHING THE THICK WALLS WHILE LEAVING THIN WALLS (260) OF CONFORMING LAYER.