Method for measurement of a power device

摘要

A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.

主权项

1. A method for measuring an electrical characteristic of a device under test (DUT), wherein the DUT includes a power device, the method comprising:
mounting the DUT within a prober, wherein the prober includes a chuck, a test probe, and a signal unit, wherein the DUT includes a semiconductor device that is configured for high voltage and high power operation, and further wherein the test probe is configured to selectively provide electrical communication between the signal unit and a contact area of the DUT; blocking an electrical connection between the signal unit and the test probe when the test probe is not in electrical communication with the contact area; unblocking the electrical connection between the signal unit and the test probe when the test probe is in electrical communication with the contact area; and measuring the electrical characteristic of the DUT subsequent to the unblocking, wherein the measuring includes providing at least one of a high voltage test signal and a high power test signal from the signal unit to the DUT.