Angular velocity sensor

摘要

Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

主权项

1. An angular velocity sensor, comprising:
a mass body; a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body; a first flexible part connecting the mass body with the first frame in an X-axis direction; a second flexible part connecting the mass body with the first frame in a Y-axis direction; a second frame disposed at an outer side of the first frame so as to be spaced apart from to the first frame; a third flexible part connecting the first frame with the second frame in a X-axis direction; and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction, wherein a width in a Y-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof, a thickness in a Z-axis direction of the second flexible part is larger than a width in an X-axis direction thereof, a thickness in a Z-axis direction of the third flexible part is larger than a width in a Y-axis direction thereof, and a width in an X-axis direction of the fourth flexible part is larger than a thickness in a Z-axis direction thereof.