发明名称 |
METHOD FOR DETERMINING A THREE-DIMENSIONAL STRESS FIELD OF AN OBJECT, AN INTEGRATED STRUCTURE IN PARTICULAR, AND CORRESPONDING SYSTEM |
摘要 |
A method and corresponding system are provided for determining a three-dimensional stress field of an object having a flat surface. At least four flat resistors are placed on the flat surface of the object, with at least one of the resistors having a geometry different from that of the others. A variation of resistance of the resistors is measured. The three-dimensional stress field is determined from a system of equations involving the stress field, values of variations of the measured resistive values and sensitivity parameters of the resistors. |
申请公布号 |
US2014373640(A1) |
申请公布日期 |
2014.12.25 |
申请号 |
US201414311497 |
申请日期 |
2014.06.23 |
申请人 |
STMicroelectronics SA ;STMicroelectronics (Crolles 2) SAS |
发明人 |
FIORI Vincent;BAR Pierre;GALLOIS-GARREIGNOT Sébastien |
分类号 |
G01L1/20 |
主分类号 |
G01L1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Montrouge FR |