发明名称 METHOD FOR DETERMINING A THREE-DIMENSIONAL STRESS FIELD OF AN OBJECT, AN INTEGRATED STRUCTURE IN PARTICULAR, AND CORRESPONDING SYSTEM
摘要 A method and corresponding system are provided for determining a three-dimensional stress field of an object having a flat surface. At least four flat resistors are placed on the flat surface of the object, with at least one of the resistors having a geometry different from that of the others. A variation of resistance of the resistors is measured. The three-dimensional stress field is determined from a system of equations involving the stress field, values of variations of the measured resistive values and sensitivity parameters of the resistors.
申请公布号 US2014373640(A1) 申请公布日期 2014.12.25
申请号 US201414311497 申请日期 2014.06.23
申请人 STMicroelectronics SA ;STMicroelectronics (Crolles 2) SAS 发明人 FIORI Vincent;BAR Pierre;GALLOIS-GARREIGNOT Sébastien
分类号 G01L1/20 主分类号 G01L1/20
代理机构 代理人
主权项
地址 Montrouge FR