| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device capable of inspecting a plurality of electronic elements constituting an amplifier.SOLUTION: The sensor device comprises a sensor unit (10) having a fixed electrode (19) and a movable electrode (20), a C-V conversion unit (41), and a control unit (12) for having the movable electrode displaced by electrostatic attraction and a change of electrostatic capacitance in a detection capacitor outputted to the C-V conversion unit, the C-V conversion unit having an amplifier, a main wiring and a plurality of parallel wirings connected in parallel between the input/output terminals of the amplifier, a main switch provided in the main wiring and a feedback capacitance capacitor provided in each of the parallel wirings, a plurality of sub-switches (49), and a switch control unit (53). The switch control unit controls the sub-switches so that the electrostatic capacitance configured by a plurality of feedback capacitance capacitors is smaller during an inspection mode than during a normal mode and thereby increases the output of the amplifier, causing each of the plurality of electronic elements configuring the amplifier to be operated in a saturated state. |
