GAS SENSORS AND METHODS OF PREPARATION THEREOF

摘要

Embodiments of the present disclosure include sensors, arrays of conductometric sensors, devices including conductometric sensors, methods of making conductometric sensors, methods of using conductometric gas sensors, and the like.

主权项

1. A method, comprising:
providing a conductometric porous silicon gas sensor including a silicon substrate having a porous silicon layer, wherein a plurality of metal oxide nanostructures are disposed on a portion of the porous silicon layer to provide a fractional coverage on the porous silicon layer, and functionalizing, in situ, the metal oxide nanostructures with nitrogen, sulfide, or thiol to form a in situ functionalized metal oxide nanostructures.