| 摘要 |
PROBLEM TO BE SOLVED: To provide an ingot mounter in which a mounting plate can be fixed to an ingot while matching the crystal orientation of the ingot automatically. SOLUTION: An ingot In carried in from a carrying in/out section 12 is carried by means of a manipulator 14 and a first ingot carrier to an X-ray orientation measuring unit 18 where the crystal orientation is measured. A controller 26 calculates the maximum inclination angleλand the inclining directionθof the crystal axis from measurements and then the ingot In is carried to slice base bonder 20 where the ingot In is turned byθdeg. about the ingot axis and a slice base S is bonded to the lower surface of the ingot. Subsequently, the ingot In is carried to a mounting plate bonder 24 where a mounting plate M turned byλdeg. horizontally is bonded to the lower surface of the slice base. Finally, the ingot is carried to the carrying in/out section by means of the manipulator 14.
|
