| 摘要 |
Provided is a chamber, having a ceramic window disposed in a ceiling of the chamber. The chamber includes a ceramic support having a plurality of spokes that extend from a center region to an outer periphery, and each of the spokes includes a hammerhead shape that radially expands the ceramic support in a direction that is away from an axis of a spoke. A plurality of screw holes are disposed through the ceramic support. The plurality of screw holes are defined to enable screws to connect to a TCP coil having an inner and outer coil. The outer coil is to be disposed under the hammerhead shape of each of the spokes, and a radial gap is defined between each of the hammerhead shapes. The radial gap defines a non-continuous ring around the outer coil. A plurality of screws are disposed through the screw holes for attaching the TCP coil. |
