| 摘要 |
In accordance with one aspect of the present invention, a multi charged particle beam writing method includes; converting a gray scale value into a binary number of a predetermined digit number set in advance, wherein the gray scale value is obtained by dividing a total irradiation time of all a number of times of writing of one corresponding beam of multiple charged particle beams or a plurality of corresponding beams of the multiple charged particle beams which irradiate a same position of a target object by a quantization unit when performing multi-pass writing using the multiple charged particle beams formed from a charged particle beam; and irradiating the target object with the multiple charged particle beams each respectively being one of beams of irradiation time periods of a set of irradiation steps corresponding to writing processing concerned of a plurality of writing processing of the multi-pass writing, for each writing processing of the multi-pass writing, using each set of irradiation steps as a set of irradiation steps of one of the plurality of writing processing of the multi-pass writing, where the each set of irradiation steps is obtained by dividing entire irradiation steps of all a number of times of writing of a beam concerned into a predetermined digit number irradiation steps to be respectively set as an irradiation time obtained by multiplying a corresponding second gray scale value by a quantization unit, wherein the corresponding second gray scale value is one of a plurality of second gray scale values defined in decimal numbers converted from each digit value of a binary number of the predetermined digit number, or the each set of irradiation steps is obtained by further dividing a part of the predetermined digit number irradiation steps in order to obtain a plurality of irradiation steps more than the predetermined digit number irradiation steps. |
