CAPACITIVE, CERAMIC PRESSURE-MEASURING CELL AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a pressure-measuring cell (1) having a ceramic measuring membrane (2) and a ceramic counter body (4), wherein the measuring membrane (2) is joined to the counter body (4) in such a way that a pressure chamber is formed between the measuring membrane and the counter body, wherein the pressure-measuring cell (1) also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane (2), which capacitive transducer has at least one membrane electrode (8) arranged on the measuring membrane and at least one electrode (10, 12) on the counter body side, wherein according to the invention at least one membrane electrode (2) comprises a titanium oxide.