| 发明名称 |
SPIN ON HARD-MASK MATERIAL |
| 摘要 |
Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask. |
| 申请公布号 |
EP2812391(A1) |
申请公布日期 |
2014.12.17 |
| 申请号 |
EP20130704222 |
申请日期 |
2013.01.31 |
| 申请人 |
THE UNIVERSITY OF BIRMINGHAM |
发明人 |
FROMMHOLD, ANDREAS;ROBINSON, ALEX;MANYAM, JEDSADA |
| 分类号 |
C08K9/04;B05D1/00;C09C3/08;H01L21/00 |
主分类号 |
C08K9/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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