| 摘要 |
<p>The invention allows evaporation materials discharged from evaporation sources to deposit on a substrate with a desired pattern, while eliminating the need for the conventional strip-shaped shadow mask, and enables correction of the effects due to the substrate being displaced during conveyance. In the apparatus for manufacturing an organic EL device, a first drive section rotates a roller at a specific rotational speed, thereby conveying the substrate that is in contact with the roller. This apparatus performs deposition of evaporation materials discharged from evaporation sources on the substrate with such conveyance. In this apparatus, a shielding section is driven by a second drive section so as to pivot around an axis of the roller at a specific pivot speed, thereby shielding and unshielding the substrate. The second drive section changes the pivot speed of the shielding section so that it is different from the rotational speed of the roller.</p> |
