发明名称 VACUUM PUMP
摘要 <p>A vacuum pump (10) includes a pump casing (56) having an inlet port (54a), an outlet port (54b), and pump chambers (50a-50f) defined therein, rotational shafts 60 having opposite ends rotatably supported by bearings (84a, 84b) on the pump casing (56) and extending longitudinally in the pump casing (56), and rotors (62a-62f) housed in the pump chambers (50a-50f) and coupled to the rotational shafts (60) for rotation in unison with the rotational shafts (60). The pump casing (56) has an atmosphere-vented compartment (52) defined therein which is held in fluid communication with the outlet port (54b) of the pump casing (56) and vented to the atmosphere.</p>
申请公布号 EP2715139(A4) 申请公布日期 2014.12.17
申请号 EP20120793624 申请日期 2012.05.29
申请人 EBARA CORPORATION 发明人 KUDARA, SOICHI;NIIMURA, YASUHIRO;NAGAYAMA, MASAMI
分类号 F04C25/02;F04C13/00;F04C18/12;F04C18/18;F04C23/00;F04C27/00 主分类号 F04C25/02
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