Method and device for coating substrates from the vapor phase

摘要

In a method for coating substrates with materials to be vaporized in a vacuum coating system, the vaporization material is deposited on the substrate by double vaporization using an intermediate carrier. The intermediate carrier is continuously moved and cylindrical.

主权项

1. A coating device for coating substrates with organic material by double vaporization, comprising:
a first vaporization device vaporizing an organic material inside a vacuum coating system, an intermediate carrier comprising a quartz drum bearing a heat absorber layer and having a rotation axis for rotation of the intermediate carrier in a rotation direction between a first position spatially proximate the first vaporization device, at which the vaporized organic material is deposited on the intermediate carrier, and a second position spatially proximate a substrate, a heating apparatus arranged inside the intermediate carrier and configured to heat the absorber layer with radiation having a wavelength minimally absorbed by the intermediate carrier, and re-vaporize the organic material on the intermediate carrier when the intermediate carrier is in the second position, a cooling apparatus for cooling the substrate in a region of the heating apparatus, and water cooled surfaces covering a part of the intermediate carrier between the first vaporization device and the heating apparatus, on both sides of the heating apparatus, to cool the absorber layer, and a drive system comprising drive rollers arranged in an edge region of the intermediate carrier for continually rotating the intermediate carrier from the first position to the second position, while avoiding roller contact with the organic material on the intermediate carrier.