| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chip transport device for which an installation space can be reduced.SOLUTION: A chip transport device comprises: a reflux path 10 which is so formed as to extend in one direction; a push rod 20 which is disposed inside the reflux path 10 and extends along the reflux path 10; an engagement chain unit 30 which includes a pair of engagement chains, which form a rigid part by engagement with each other and are separated from each other by disengagement therebetween, and in which an end of the rigid part is connected to one end of the push rod 20; and a drive part 40 for driving the engagement chain unit 30 in such a manner that the end of the rigid part reciprocates along a direction of extension of the reflux path 10 and the pair of engagement chains are separated to a direction different from the direction of extension of the reflux path 10.</p> |
