| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner, an optical scanner control device, and an optical scanner unit, capable of suppressing an influence due to the lowering of an output voltage and noise as a result of the aged deterioration of a piezoelectric sensor.SOLUTION: N optical scanner supports a mirror support part for supporting a mirror by a twist beam from both sides in an axial direction and rocks the mirror support part in a direction around an axis by a twist of the twist beam, and includes: drive beams which are provided to be formed in pair so as to sandwich the mirror and the mirror support part; a connection beam for connecting one side of a drive beam to the twist beam; and a piezoelectric sensor for detecting displacement of the connection beam due to rocking around the axis of the twist beam when a drive voltage is applied to the drive beam formed on the connection beam to rock the mirror. The piezoelectric sensor has an upper electrode impressed with a first bias voltage of a positive polarity or a negative polarity, and has a lower electrode impressed with a second bias voltage of a polarity reverse to the polarity impressed to the upper electrode. |
