MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE WAVE PLASMA PROCESSING APPARATUS

摘要

A microwave emission mechanism includes: a transmission path through which a microwave is transmitted; and an antenna section that emits into a chamber the microwave transmitted through the transmission path. The antenna section includes an antenna having a slot through which the microwave is emitted, a dielectric member through which the microwave emitted from the antenna is transmitted and a closed circuit in which a surface current and a displacement current flow. A surface wave is formed in a surface of the dielectric member. The closed circuit has at least: an inner wall of the slot; and the surface and an inner portion of the dielectric member. When a wavelength of the microwave is λ0, a length of the closed circuit is nλ0±δ, where n is a positive integer and δ is a fine-tuning component including 0.

主权项

1. A microwave emission mechanism for emitting into a chamber a microwave generated by a microwave generation mechanism, in a plasma processing apparatus for performing plasma processing by generating a surface wave plasma in the chamber, the microwave emission mechanism comprising:
a transmission path through which the microwave is transmitted, the transmission path including a cylindrical outer conductor and an inner conductor coaxially disposed within the outer conductor; and an antenna section configured to emit into the chamber the microwave transmitted through the transmission path, wherein the antenna section includes: an antenna having a slot through which the microwave is emitted; a dielectric member through which the microwave emitted from the antenna is transmitted, a surface wave being formed on a surface of the dielectric member; and a closed circuit in which a surface current and a displacement current flow, the closed circuit having at least an inner wall of the slot and the surface and an inner portion of the dielectric member, and wherein when a wavelength of the microwave is λ0, a length of the closed circuit is nλ0±δ, where n is a positive integer and δ is a fine-tuning component including 0.