METAL NITRIDE MATERIAL FOR THERMISTORS, METHOD FOR PRODUCING SAME, AND FILM-TYPE THERMISTOR SENSOR

摘要

Provided are: a metal nitride material for thermistors that has high heat resistance, is highly reliable, and can be formed into a film directly on, e.g., a film without firing; a method for producing said metal nitride material; and a film-type thermistor sensor. This metal nitride material used for thermistors is made of a metal nitride represented by the general formula VxAlyNz (wherein 0.70 ≤ y/(x+y) ≤ 0.98, 0.4 ≤ z ≤ 0.5, and x+y+z = 1), and has a single-phase wurtzite hexagonal crystal structure. This method for producing said metal nitride material for thermistors comprises a film formation step for forming a film by performing reactive sputtering in a nitrogen-containing atmosphere by using a V-Al alloy sputtering target.