发明名称 ULTRASONIC TRANSDUCER HAVING DUAL MODE FOR WIRE BONDING AND BONDING APPARATUS HAVING THE SAME
摘要 The present invention relates to an ultrasonic transducer with a dual mode for wire bonding and a bonding apparatus with the dual mode for wire bonding including the same. According to the present invention, a front part into which a capillary is inserted is formed on the front side of a body part. A rear part is formed on the rear side of the body part and protrudes to be symmetrical with regard to the front part. A fixing part is formed on both sides of the body part. Also, a control groove is formed on the rear part of the body part to control impedance. Thereby, the ultrasonic transducer according to the present invention is used for ball bonding and wedge bonding by including two target frequencies at the same time and performs bonding with high quality for a short time by including low impedance.
申请公布号 KR20140140979(A) 申请公布日期 2014.12.10
申请号 KR20130062100 申请日期 2013.05.30
申请人 UNIVERSITY OF SEOUL INDUSTRY COOPERATION FOUNDATION. 发明人 LEE, SOO IL;HA, GI HONG
分类号 H01L21/60 主分类号 H01L21/60
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