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发明名称
成膜方法及び成膜装置
摘要
申请公布号
JP5638147(B2)
申请公布日期
2014.12.10
申请号
JP20130536339
申请日期
2012.09.26
申请人
发明人
分类号
C23C14/22;C23C14/02;C23C14/24;C23C14/48;G02B1/10
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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