| 摘要 |
The heat treatment apparatus (40) of the present invention, which is an apparatus for producing array substrates (20) for liquid crystal panels (11), comprises: a roller conveyor (transport unit)(41) that transports glass substrates (display panel substrates)(GS); a heat treatment chamber (43) for heat-treating glass substrates (GS) conveyed by the roller conveyor (41); a heating unit (44) for heating the glass substrates (GS), said heating unit (44) being positioned inside the heat treatment chamber (43); an internal air circulating unit (47) for circulating air inside the heat treatment chamber (43); and a heat exchanger (48) that is connected to the internal air circulating unit (47) and which is capable of performing heat exchange with the circulated air. |
