| 摘要 |
FIELD: measurement equipment.SUBSTANCE: autocollimator may be used for measurement of rotation angles relative to two axes orthogonal to autocollimator lens axis using one CCD-ruler. Autocollimator includes optical system of autocollimating mark image formation based on source of radiation, located in sequence condenser, mark, beam splitter and lens, photodetector in the form of CCD-ruler with control system including sync-pulse generator, and system for processing of videosignals from low-pass filter, video pulse former and video pulse fronts former, and unit of data processing. Mark and photodetector are installed in lens focal plane. Introduced series-connected are selector, peak detector, subtractor and power amplifier. Selector input is connected to low-pass filter output, and power amplifier output is connected to radiation source. Mark is designed as a set of continuous bars forming three horizontal zones, medium of which is designed from at least one vertical bar and at least one inclined side bar. Bars height is equal to zone height, horizontal sections of mark in various zones differ by quantity of bars sections or their mutual arrangement.EFFECT: improving accuracy, compactness and reliability.5 cl, 3 dwg |
